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Apr 24, 2024
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EE 5183 - Micro and Nano Fabrication
Basic steps of fabrication used in the manufacturing of micro and nanoscale electronic devices. Si BiCMOS technology to be relevant to industry applications, while novel fabrication tools and processes used in the nanoscale engineering also included. Nanotechnology materials, devices and technologies that serve computing, communication and medical applications. Example applications chosen from CMOS chips, novel nanomaterials, MEMS/NEMS, photonics, and biomedical engineering.
Requisites:
Credit Hours: 3
Repeat/Retake Information: May not be retaken.
Lecture/Lab Hours: 3.0 lecture
Grades: Eligible Grades: A-F,WP,WF,WN,FN,AU,I
Learning Outcomes:
- Appreciation of basic clean-room tools, safe operating practices and occupational hazards in micro-fabrication processes.
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